To benefit the most from the material presented in this course, you should have a good understanding of the physics involved in the fabrication process of microelectronic devices and/or microelectronic device physics. Properly mesh structures for adequate simulations.Select proper models for the simulation of fabrication processes and electrical behavior of devices.Successfully combine mask layouts and process flows to perform simulations of fabrication processes involving single or multiple semiconductors, insulators and metals.Visualize simulated doping profiles, structure boundaries and materials, I-V curves and internal device characteristics such as carrier densities, current densities, and electric fields.Run parameterized process and device simulations.In the SWBnmos example, these are Sentaurus Process, Sentaurus Structure. At the end of this workshop the student should be able to: Sentaurus Device User Guide, 2015, Version K-2015.06 Google. Overview Introduction to Sentaurus TCAD software Building the device structure Running the simulation Viewing results Other software Example simulations 3D detectors 3D detector photodiode detector with electrode columns passing through substrate Small electrode spacing gives fast collection, low Vdep Radiation hardness.
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